ELECTRON BEAM PROBE MICRO X-RAY ANALYTICAL METHOD, AND ANALYZER THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an electron beam probe micro X-ray analytical method capable of analyzing a depth-directional element distribution from a surface of an analyzed sample.;SOLUTION: In this electron beam probe micro X-ray analytical method of the present invention for irradiating the surface of the analyzed sample 5 with an electron beam 2, and for measuring an intensity of a characteristic X-ray induction-output from the surface of the analyzed sample 5 by the electron beam 2, an angle of the measuring characteristic X-ray is changed within a prescribed range, with respect to the surface of the analyzed sample 5, the characteristic X-rays are measured at the plurality of angles, and an element of the analyzed sample 5 is analyzed based on the intensity measured in each of the angles.;COPYRIGHT: (C)2006,JPO&NCIPI