PROTECTION TOOL AND ITS USING METHOD, METHOD FOR MANUFACTURING LIQUID DROP EJECTION HEAD EMPLOYING THE PROTECTION TOOL, LIQUID DROP EJECTION HEAD MANUFACTURED BY THE METHOD, AND LIQUID DROP EJECTOR MOUNTING THE LIQUID DROP EJECTION HEAD

摘要

PROBLEM TO BE SOLVED: To provide an easy-to-handle protection tool and its using method, a method for manufacturing a liquid drop ejection head capable of preventing intrusion of processing liquid into the space section of a drive mechanism by employing the protection tool, a liquid drop ejection head manufactured through the method, and a liquid drop ejector mounting the liquid drop ejection head.;SOLUTION: The protection tool 70 being fixed to a substrate through vacuum suction and protecting the surface of the substrate on the fixing side comprises a protection tool body 71 having a second recess 76 for forming a vacuum holding space between the recess and the surface of the substrate on the fixing side, and an O-ring 74 for holding airtightness of the space by touching the substrate.;COPYRIGHT: (C)2006,JPO&NCIPI