SELF-ADAPTATION FEED-FORWARD CONTROL ADJUSTMENT FOR MOTION SYSTEM, AND LITHOGRAPHY EQUIPMENT HAVING SUCH MOTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a system that controls a high-precision motion such as a stepping and scanning operation of a lithography projection apparatus, i.e., a flexible control system that combines lower feed-forward control and iterative learning control with no need of manual adjustment while being simple, plus being adaptive to a slow change of a motion system.;SOLUTION: This motion control system takes into consideration a snap s, a jerk j, an accelerated velocity a, and a velocity v that are all the targets of control, begins respective feed-forward coefficients kfs, kfj, kfa, and kfv with initial settings, and learns until there will be no difference between a desired motion and a real motion, repeating updates. This will enable feed-forward adjustment to be automated, and to be easily executed by being combined with existing motion control software, and will eliminate manual adjustment steps, and adapt the system to a slow change since it is continuously updated.;COPYRIGHT: (C)2006,JPO&NCIPI