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DEVICE FOR MEASURING DEFECT EXISTING IN LIGHT TRANSMITTING SINGLE LAYER BODY OR LAMINATE
DEVICE FOR MEASURING DEFECT EXISTING IN LIGHT TRANSMITTING SINGLE LAYER BODY OR LAMINATE
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机译:用于测量光透射单层主体或叠层中存在的缺陷的设备
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摘要
PROBLEM TO BE SOLVED: To provide a device for measuring a defect of an object in conformity with an optical property of the object.;SOLUTION: This device for measuring a defect existing in a light transmitting single layer body or a laminate is equipped with a light source for irradiating light from the back of the light transmitting single layer body or the laminate, one or two or more light quantity adjusting plates for adjusting the quantity of light irradiated from the light source, one or two or more slit plates positioned between the light quantity adjusting plates and the light transmitting single layer body or the laminate, and one or two or more detectors for recognizing the defect existing in the light transmitting single layer body or the laminate from the surface of the light transmitting single layer body or the laminate by the light irradiated from the back of the light transmitting single layer body or the laminate.;COPYRIGHT: (C)2006,JPO&NCIPI
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