FILM OPTICAL WAVEGUIDE AND ITS MANUFACTURING METHOD, AND BASE MATERIAL FOR FILM OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To provide the manufacturing method of a film optical waveguide, with which a sacrificial layer can be formed by a simple means to attain cost reduction.;SOLUTION: An ultraviolet ray curing water-soluble polymer 2 is applied onto a substrate 1 that transmits ultraviolet rays. After the water-soluble polymer 2 is spread flat by pressing it with a stamper, ultraviolet rays are emitted to cure the water-soluble polymer 2 to form the sacrificial layer 4. Then, on the sacrificial layer 4, there are successively formed a lower clad layer 5, a core 6 and an upper clad layer 9, so that the film optical waveguide 10 is made on the sacrificial layer 4. Thereafter, by dissolving the sacrificial layer 4 with water or warm water, the substrate 1 is separated from the film optical waveguide 10.;COPYRIGHT: (C)2006,JPO&NCIPI