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APPARATUS FOR INSPECTING IRREGULARITIES IN PERIODIC PATTERN, AND METHOD FOR INSPECTING IRREGULARITIES IN PERIODIC PATTERN USING SAME
APPARATUS FOR INSPECTING IRREGULARITIES IN PERIODIC PATTERN, AND METHOD FOR INSPECTING IRREGULARITIES IN PERIODIC PATTERN USING SAME
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机译:用于检查周期性图案中的不规则性的装置以及使用相同的方法来检查周期性图案中的不规则性的方法
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus and method for inspecting irregularities in a periodic pattern, capable of stably and precisely detecting the irregularities of the periodic pattern.;SOLUTION: The apparatus for inspecting the irregularities of the periodic pattern is equipped with an imaging section (10), having at least a means for imaging an image; an XY stage (20), on which an object substrate to be inspected is mounted and which has a means for driving it in the X-axis and Y-axis directions; an illumination section (30) having a means for illuminating the object substrate to be inspected; an optical filter changing section (40a, 40b) which sets optical filters at the illumination section and/or the photographing section, in order to regulate their optical characteristics and which has a means of enabling the optical filters to be changed; and a section (60) for controlling the apparatus.;COPYRIGHT: (C)2006,JPO&NCIPI
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