MEASURED DATA RECOVERY METHOD, MEASUREMENT METHOD, EVALUATION METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To expand measured data in the form of Fourier series with a high precision.;SOLUTION: When measuring a spatial image provided via a pulsed light source with a slit scan, the position of a slit at the time when the pulse emits is stored in advance. The multiplication result of the spatial image data (round dots) and basic waves (thick line) is further multiplied by integration fragments (d₁ to d₇) that correspond to the stored slit position. Since Fourier integration is provided by integrating the area obtained by the multiplication, the integration result is made highly precise.;COPYRIGHT: (C)2006,JPO&NCIPI