METHOD FOR PRODUCING INTEGRALLY SINTERED Mo BASED TARGET MATERIAL, AND INTEGRALLY SINTERED Mo BASED TARGET MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for producing an integrally sintered Mo based target material with an isotropic structure having whole length of ≥2,000 mm, and to provide an integrally sintered Mo based target material.;SOLUTION: In the method for producing an integrally sintered Mo based target material having whole length of ≥2,000 mm, a consolidated body obtained by subjecting Mo raw material powder to compression molding is sintered in a reducing atmosphere to produce a primarily sintered compact having a relative density of 75 to 90% and whose whole length is ≥2,500 mm, next, the primarily sintered compact is inserted into a pressure vessel, is deaerated and sealed, and is thereafter subjected to pressure sintering by hot hydrostatic pressing, so as to obtain a sintered compact target material having a relative density of ≥98%.;COPYRIGHT: (C)2006,JPO&NCIPI