GLASS SUBSTRATE STORAGE CASE, GLASS SUBSTRATE REPLACEMENT DEVICE, GLASS SUBSTRATE CONTROL DEVICE, GLASS SUBSTRATE DISTRIBUTION METHOD, SEALING MEMBER AND SEALING STRUCTURE USING THIS SEALING MEMBER

摘要

PPROBLEM TO BE SOLVED: To provide a glass substrate storage case which can prevent quality degradation of a glass substrate, to provide a glass replacement device with which the glass substrate can be replaced from a glass substrate storage case to the other case automatically, to provide a glass substrate control device with which the glass substrate is controlled individually, to provide a glass substrate distribution method in which the glass substrate is stored in an exclusive storage case for dealing and to provide a sealing member which can raise airtight effectiveness and to provide a sealing structure using the sealing member. PSOLUTION: The glass substrate storage case is composed of a bottom member 12 on which a reticle R is placed, a lid member 20 which can be fit on the bottom member 12 as covering the reticle R placed on the bottom member 12 and makes a space between the bottom member 12 and the lid member, the sealing member 18 which is provided on the bottom member 12 and/or the lid member 20 and makes the space airtight in a state that the lid member 20 is fit on the bottom member 12 and a hook member 24 which is provided on the lid member 20 and hooks on the bottom member 12 so that fitting the lid member 20 on the bottom member 12 can be maintained. PCOPYRIGHT: (C)2006,JPO&NCIPI