ROTARY VACUUM PUMP, BALANCE REGULATING STRUCTURE THEREOF, AND METHOD OF REGULATING BALANCE THEREIN

摘要

PROBLEM TO BE SOLVED: To effectively and quickly regulate the balance of rotation mass in a pump provided with a machine bearing such as a rotary vacuum pump, or more specifically, a turbo molecular vacuum pump.;SOLUTION: The device includes displacement sensors 121A-121F (221A-221F), coupled to a pump base part 103 (203), and provided to be close to a pump rotor 113 (213) and/or its rotation axis 105 (205). The sensor is directed toward the rotation axis, and provided perpendicularly to it to detect uneven distribution in a case where mass of the rotor 113 (213) is unequally disposed to the rotation axial center. This device also relates to a balance regulating structure of the rotary pump, and a method for regulating the balance.;COPYRIGHT: (C)2006,JPO&NCIPI