GAS JET MECHANISM FOR TEST PROBE BUILT IN SUBSTRATE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas jet mechanism for test probe built in a substrate inspection device capable of disturbing the mixture of lubricant oil into the supply air and controlling flow path by eliminating an electromagnetic valve.;SOLUTION: At least a first flow path control valve 34 mechanically switching the flow path of air supplied from an air supply source, a second flow control valve 52 operated by receiving pressure of air supplied from the first intake path ensured by the first flow path control valve 34, and a nozzle 18 provided with a gas jet piece discharging gas directly sent from the gas supply source via a second intake path ensured by the second flow path control valve 52 to a specific direction are provided. The nozzle 18 is arranged by making free, the jet to a contact pin of a test probe 101 provided with a substrate test device.;COPYRIGHT: (C)2006,JPO&NCIPI