TUNABLE OPTICAL FILTER AND METHOD OF MANUFACTURING TUNABLE OPTICAL FILTER

摘要

PROBLEM TO BE SOLVED: To provide a tunable optical filter in which the attenuation of light emitted from a tunable optical filter is prevented and the separation of wavelength is possible for the light having various wavelengths, and to provide a method of manufacturing the tunable optical filter.;SOLUTION: The tunable optical filter is provided with: a base substrate 2 having a through hole 24; a movable substrate 3 provided with a movable part 31 having an open part 311; a light transmissive substrate 4 connected to the movable part 31 to cover the open part 311 and provided with a movable reflection film 210; a fixed substrate 5 on which a fixed reflection film 200 is provided at a part facing to the movable reflection film 210 via a interference gap 9; and a driving part which varies the amount of the interference gap 9 by dislocating the movable part 31 with respect to the fixed substrate 5 by Coulomb force. The tunable optical filter is characterized in that reflections are repeated between the fixed reflection film 200 and the movable reflection film 210 and the interference light having a wavelength corresponding to the amount of the interference gap 9 is emitted outside.;COPYRIGHT: (C)2006,JPO&NCIPI