Optical spectrum analyzer method for manufacturing an optical device, optical device, the wavelength tunable filter, and wavelength tunable filter module,

摘要

PPROBLEM TO BE SOLVED: To provide an optical device, capable of performing wavelength separation in a visible light region with high accuracy, while lowering the production cost thereof, and to provide a method of manufacturing the optical device, a wavelength variable filter, a wavelength variable filter module and an optical spectrum analyzer. PSOLUTION: The optical device 1 includes: a first driving electrode 28 arranged on the second structure 3 side surface of a movable part 21; and a second driving electrode 33 arranged on a second structure 3 to be opposed to the first driving electrode 28. A first structure 2 and the second structure 3 are joined to each other while interposing a metal layer 4 consisting of a metal as a main material between them. A voltage is applied between the first driving electrode 28 and the second driving electrode 33, while using the metal layer 4 as an electric conductor to form electrostatic attraction between them, and displace the movable part 21. PCOPYRIGHT: (C)2011,JPO&INPIT