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PLATFORM CHIP OR HIGH-TEMPERATURE STABLE SENSOR HAVING CONDUCTOR STRUCTURE EXPOSED TO EXTERNAL INFLUENCE, METHOD FOR MANUFACTURING PLATFORM CHIP OR SENSOR, AND USE OF SENSOR
PLATFORM CHIP OR HIGH-TEMPERATURE STABLE SENSOR HAVING CONDUCTOR STRUCTURE EXPOSED TO EXTERNAL INFLUENCE, METHOD FOR MANUFACTURING PLATFORM CHIP OR SENSOR, AND USE OF SENSOR
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机译:导体结构受到外部影响的平台芯片或高温稳定传感器,制造平台芯片或传感器的方法以及传感器的使用
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摘要
PROBLEM TO BE SOLVED: To provide a sensor for gas concentration detection, which can continuously perform measurement in an exhaust gas which needs platform chip heating for detecting and measuring a gas component such as O2 detected in an area between 650-950°C or has a high temperature exceeding 600°C.;SOLUTION: In the platform chip or high-temperature stable sensor having a conductor structure exposed to an external influence, the conductor structure has a conductive oxide and/or the part of the conductor structure has a resistance characteristic curve continuously stable, particularly, under a high-temperature load between 600 and 950°C. Further, the method for manufacturing a platform chip or sensor, a suspension has a noble metal particle, and the noble metal particle is smaller than 50 nm, particularly, 20 nm.;COPYRIGHT: (C)2006,JPO&NCIPI
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