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ELECTRON BEAM DETECTOR, ELECTRON BEAM DRAWING METHOD USING THE SAME, AND ELECTRON BEAM DRAWING DEVICE
ELECTRON BEAM DETECTOR, ELECTRON BEAM DRAWING METHOD USING THE SAME, AND ELECTRON BEAM DRAWING DEVICE
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机译:电子束检测器,使用该电子束检测器的电子束绘制方法以及电子束绘制装置
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摘要
PROBLEM TO BE SOLVED: To provide an electron beam detector of transmission type which measures the profile of a plurality of electron beams in proximity simultaneously, and an electron beam drawing technology which realizes a high precision drawing using the same.;SOLUTION: The electron beam detector comprises a means (103) of transforming the electron beams (101) passed through aperture marks (102) into light (105) and a plurality of light detecting elements (107) corresponding to them, and by scanning the electron beams on the marks, separates (106) the generated light (105), and carries out simultaneous measurement of the profile of a plurality of electron beams.;COPYRIGHT: (C)2006,JPO&NCIPI
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