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ELECTRON EMISSION ELEMENT HAVING ATMOSPHERIC ELECTRON EMISSION CHARACTERISTIC, ITS MANUFACTURING METHOD AND ELECTRON EMISSION METHOD USING IT
ELECTRON EMISSION ELEMENT HAVING ATMOSPHERIC ELECTRON EMISSION CHARACTERISTIC, ITS MANUFACTURING METHOD AND ELECTRON EMISSION METHOD USING IT
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机译:具有大气电子发射特性的电子发射元件,其制造方法和使用它的电子发射方法
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摘要
PROBLEM TO BE SOLVED: To realize an electron emission element stably operating in the atmosphere, its manufacturing method, and a field electron emitting method using the element.;SOLUTION: By using a rare gas of argon, helium or the like, simple hydrogen or a mixed dilution gas of them, by generating plasma in an atmosphere with 0.0001-100 vol.% of a boron source and a nitrogen source material gas introduced into the dilution gas under pressure of 0.001-760 Torr, or without generating plasma, and by irradiating an electron emission element substrate kept at a room temperature to 1,300°C with an ultraviolet ray, a surface shape containing a material represented by BN, formed of sp3-bonding BN or a mixture of sp2 binding BN and itself, having a pointed tip, and stably emitting electrons in the atmosphere by applying a voltage is formed in a self-forming manner, and the substrate is recovered.;COPYRIGHT: (C)2006,JPO&NCIPI
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