PROBLEM TO BE SOLVED: To obtain a catalyst contact radical creation equipment arranged to introduce a plurality of kinds of material gas into a reaction chamber and to dissociate the material gas through contact with a catalyst in which the material gas can be dissociated with a high decomposition rate as compared with prior art.;SOLUTION: The catalyst contact radical creation equipment comprises a plurality of gas introduction means 50-1 and 50-2 for introducing a plurality of kinds of material gas G-1 and G-2, respectively, into a reaction chamber 40, catalysts 13-1 and 13-2 provided one or more for each gas introduction means 50-1, 50-2 in the reaction chamber 40 and capable of dissociating the material gas G-1, G-2 introduced into the reaction chamber 40 by the gas introduction means 50-1, 50-2, and a means 14 for suppressing contact between the catalyst 13-1 (or 13-2) provided for each gas introduction means 50-1 (or 50-2) and the material gas G-2 (or G-1) introduced into the reaction chamber 40 by the other gas introduction means 50-2 (or 50-1) different from the one gas introduction means 50-1 (or 50-2).;COPYRIGHT: (C)2006,JPO&NCIPI
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