PROCESS FOR FABRICATING OPTICAL ELEMENT, OPTICAL ELEMENT, ALIGNER, ALIGNING METHOD, AND PROCESS FOR FABRICATING DEVICE HAVING MICROPATTERN

摘要

PROBLEM TO BE SOLVED: To provide a process for fabricating an optical element in which film deposition with uniform thickness is realized even in case of a material which is apt to grow insularly at the time of depositing a capping layer.;SOLUTION: In the process for fabricating an optical element for use in a projection aligner, an oxidation-resistant film (107) is deposited thicker than that under actual use state on the surface of the optical element, and then a part thereof is removed thus depositing an oxidation-resistant film (107) of uniform thickness.;COPYRIGHT: (C)2006,JPO&NCIPI