Jointing the coil or the antenna in thermometry manner of the substrate, amendment manner and the substrate thermal treatment equipment null crystal vibrator

摘要

PROBLEM TO BE SOLVED: To measure the temperature of a substrate accurately even at high temperatures.;SOLUTION: A thermometer element S formed by connecting a quartz oscillator 9 and a coil 10 is set in a dummy substrate 4. In a non-contact state with the dummy substrate 4, a transmission wave having a frequency corresponding to a characteristic frequency of the quartz oscillator 9 is transmitted to the thermometer element S. Meanwhile, a sensor coil 11 for receiving electromagnetic waves from the thermometer element S, a switch 12, and a transmitter 13 and a receiver 14 are equipped. After stopping the transmission of the transmission wave, an electromagnetic wave in accordance with the temperature of the dummy substrate which is emitted from damped oscillation of the quartz oscillator 9 after resonance is received, and the temperature of the dummy substrate 4 is measured based on the frequency of the electromagnetic wave from the thermometer element S.;COPYRIGHT: (C)2004,JPO