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EXTREMELY LOW TEMPERATURE COOLING WINDOW MATERIAL, EXTREMELY LOW TEMPERATURE COOLING APPARATUS FOR ASTRONOMICAL OBSERVATION DEVICE, AND EXAMINATION EQUIPMENT UTILIZING TERAHERTZ WAVE OBSERVATION
EXTREMELY LOW TEMPERATURE COOLING WINDOW MATERIAL, EXTREMELY LOW TEMPERATURE COOLING APPARATUS FOR ASTRONOMICAL OBSERVATION DEVICE, AND EXAMINATION EQUIPMENT UTILIZING TERAHERTZ WAVE OBSERVATION
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机译:极低温冷却窗材料,用于天文观测装置的极低温冷却装置以及利用TERAHERTZ波观测的检测设备
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摘要
PROBLEM TO BE SOLVED: To provide a cooling window material which has an enlarged diameter of at least 170 mm together with characteristics of efficiently absorbing thermal infrared rays, improving thermal conductivity, improving transparency in a sub millimeter area and reducing a reflection loss, an extremely low temperature cooling apparatus for an astronomical observation device comprising the window material, and examination equipment utilizing terahertz wave observation.;SOLUTION: An electrical wave introduction window 13 of a cooling container 11 comprises a cooling window material 14 in which a monocrystal sapphire substrate is used as a base material, a cut face is formed as a C plane, and a thick anti-reflection film of silicon oxide (SiOx) is formed on a surface of the sapphire substrate.;COPYRIGHT: (C)2006,JPO&NCIPI
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