ELECTRON BEAM SURFACE TREATMENT METHOD AND ELECTRON BEAM SURFACE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam surface treatment method where the surface of a work can be finished so as to have a fine surface roughness of about 1 μm in a relatively short period of time, and further, the surface can be uniformly finished over the whole of an objective region to be subjected to surface treatment, and to provide a device therefor.;SOLUTION: In the case that the surface layer is melted and solidified, and subjected to surface treatment by irradiating the surface of the work W with an electron beam, region information prescribing the objective region to be subjected to surface treatment in the work W is beforehand registered into a memory 19, and, based on the region information, the electron beam is two-dimensionally scanned in such a manner that a locus with the shape of a curved line is drawn in the objective region to be treated in the work W.;COPYRIGHT: (C)2006,JPO&NCIPI