GAS FLOW SENSOR DEVICE AND MANUFACTURING METHOD OF GAS FLOW SENSOR USED THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a gas flow sensor device having an easily-manufacturable gas flow sensor with a simple structure, capable of reducing power consumption, and heightening detection accuracy, and a manufacturing method of the gas flow sensor used therefor.;SOLUTION: This device is equipped with the gas flow sensor 10 having a heat insulating layer 12 interposed between a heater 13 formed on one surface side of a semiconductor substrate 11 which is a support substrate and the semiconductor substrate 11, a driving means for imparting an electric input to the heater 13 of the gas flow sensor 10, and a signal processing means for determining the flow rate of gas from a change of a resistance value of the heater 13 of the gas flow sensor 10 caused by a gas flow. Assuming that the thermal conductivity of the heat insulating layer 12 is αi and the heat capacity thereof is Ci, and that the thermal conductivity of the semiconductor substrate 11 is αs and the heat capacity thereof is Cs, the gas flow sensor 10 satisfies the relation: [αi×Ci][αs×Cs]. The driving means imparts intermittently the electric input to the heater 13.;COPYRIGHT: (C)2006,JPO&NCIPI