Putting the piezoelectric body thin film element and the ink jet type recording head which uses that and the piezoelectric body

摘要

PROBLEM TO BE SOLVED: To obtain a piezoelectric thin film element where the piezoelectric film is made thick and a large volume change is caused by providing the piezoelectric film where a stress caused in the piezoelectric film is relaxed and destruction due to a stress such as a crack is not caused when the thickness is increased. ;SOLUTION: The piezoelectric thin film element is configured by inserting a piezoelectric film 40 made of a piezoelectric material between an upper electrode 50 and a lower electrode 30. In this case, the piezoelectric film 40 has three transition layers in a direction of the film thickness, as a 1st transition layer 40b, a 2nd transition layer 40c, and a 3rd transition layer 40d from the layer close to the lower electrode sequentially, and a relation of d₁d₂d₃ is satisfied, where d₁ is a distance between the lower electrode 30 and the 1st transition layer 40b, d₂ is a distance between the 1st transition layer 40b and the 2nd transition layer 40c and d₃ is a distance between the 2nd transition layer 40c and the 3rd transition layer 40d.;COPYRIGHT: (C)1999,JPO