SOFTWARE EQUIPMENT FORMING VIEW OF FLEXIBLE APPARATUS STATE MODEL, AND SOFTWARE MECHANISM MEASURING RELIABILITY OF APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide an apparatus monitor and a lithography treatment system which can make an apparatus produce peculiar views of a user conforming to SEMI standard. PSOLUTION: A state model engine is configured so that data relating to reliability, availability and integrity of the lithography treatment system are decided dynamically. SEMI E10 defines six basic apparatus states to which all apparatus conditions and all apparatus times belong. The states are a productive state, a standby state, an engineering state, a down time state in plan, a down time state out of plan and an unplanned state. The engine judges whether a state of a defined state model has changed based on a transition event published by other state model. PCOPYRIGHT: (C)2006,JPO&NCIPI