Operation manner of vacuum blower discharge system and vacuum blower discharge device

摘要

The vacuum blower discharge system, has the vacuum blower discharge device, the vacuum blower discharge device, consists of with the motor and include turbo numerator pump discharge means numerator pump discharge feature and the backing pump discharge feature Drive the Drive shaft and the above-mentioned Drive shaft. The Drive shaft Drive the above-mentioned numerator pump discharge feature and the above-mentioned backing pump discharge feature. The vacuum blower discharge system, the exhaust air means which the exhaust air do the above-mentioned turbo numerator pump discharge means at least, for example furthermore has had the load lock pump.