Generation characteristics of a metal ion plasma jet in vacuum discharge

摘要

To improve the performance of a metal ion plasma jet in vacuum discharge,an anode-insulated cone-cylinder electrode with insulating sleeve is proposed in this paper.Discharge characteristics and generation characteristics of plasma of the electrode are investigated,effects of diameter of insulating sleeve,variety of cathode material and length of the insulating sleeve on characteristics of metal ion plasma jet are discussed.Results indicate that a directional and steady plasma jet is formed by using the novel electrode with insulating sleeve under high vacuum conditions.Moreover,the properties of metal ion plasma jet are improved by using the aluminum cathode and thin and long insulating sleeve.The study provides strong support for research of vacuum metal ion plasma thruster and ion implantation technology.