(Pyrotechnic) micro-actuators, and micro systems using this pyrotechnic having for use in micro-system, the two effects

摘要

Is used for the order to be applied to microelectronics, such as chips, thermal functional mechanically in microsystems, chemical, or electrical, or, the present invention is bio-such as a card incorporating microfluidics is used for medical function relates to the technical field of micro-actuators. Micro-actuator including a solid base (3) of the present invention is a (1,60,7) including (6,721) so-called primary explosives, so-called main chamber (2,63,720), Above the main chamber (2,63,720), for that is enclosed and is sealed with a (4,62,710) membrane deformable walls and solid foundation, by the combustion of gunpowder major (6,721) The membrane (4,62,710) is deformed by the released gas, the shape of the walls of the main chamber of the solid (2,63,720) of the volume of the chamber (2,63,720) is unchanged micro actuator to increase about (1,60,7). The present invention is characterized in that it comprises means for discharging the gas from the main chamber (720).