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How to investigate the relief shape of the structure in the optical means
How to investigate the relief shape of the structure in the optical means
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机译:如何用光学手段研究结构的浮雕形状
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摘要
How to investigate the surface that has been provided relief shape is proposed. In which the measured spectrum is taken and compared with the test spectrum to represent any structure that is adjusted in steps below. In accordance with the present invention, while optimizing the decision to adjust the layered parameters, the correlation at the representative point on the spectrum is selected.
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