Measuring device for inside measurement, manufacturing method of inner measuring reference unit, and holding device for holding the inner measuring reference unit

摘要

PROBLEM TO BE SOLVED: To enable a reference for measuring an inside to highly reliably measure the inside of an object to be measured with high accuracy by constituting the reference in such a way that the reference can directly measure the distance between two internal side faces of the object used in the origin setting or calibration of an inside measuring machine with a light-wave interferometer.;SOLUTION: A reference for measuring inside is provided with a reference gauge block 10, a first jaw block 11 which is ringed to one end face of the block 10 and has a first inner reference plane 11A on its internal surface, and a second jaw block 12 which is ringed to the other end face of the block 10 and has a second inner reference plane 12A on its internal surface. The reference is also provided with a gauge block 13 for measurement which is ringed to the reference plane 12A of the block 12. The reference is constituted in such a way that the first inner reference plane 11A of the first jaw block 11 and the outer reference plane 13A of the gauge block 13 can be seen when the planes 11A and 13A are viewed from the other end side of the block 13.;COPYRIGHT: (C)2001,JPO