Infrared measuring device, and, online method of applying infrared measuring device to the manufacturing process

摘要

To be cut off by the time the minimum necessary for normalization and standardization / calibration system InGaAs detector (68a~68d) (22) light source of the measurement system, shutter that is made from a single feather (46, 48) (38) is controlled asynchronously flag. Randomly oriented fiber bundles connected in series to the source light / detector light homogenizer or hemispherical (50, 62) (132) is to homogenize the light passed to the detector element. Testing of the light source is performed by comparing the baseline characteristics measured spectral power distribution at the source power levels of multiple, was determined for the light source to those measurements. Life of the calibration sample is extended by controlling the shutter flag to shield the light source to the calibration time shorter than a standard light level is supplied.