Being probe advanced formation method of the nano- structure and probe advanced

摘要

PROBLEM TO BE SOLVED: To provide a probe tip generating method for a nanostructure and its generating device which generates a microscopic probe tip part and controls its growth direction.;SOLUTION: This device is provided with: a chamber 1; a probe heating means 7; a setting means of a catalyst; an electric field application means 8 applying an electric field between the catalyst 3 and a probe 5; and a cantilever moving means 6. Diffusion of a catalyst material to the probe tip is generated by contacting the probe made in advance with the catalyst and keeping them at a high temperature to grow a carbon nanotube and/or a whisker-like silicon crystal.;COPYRIGHT: (C)2004,JPO