It consists of the ZnSe based compound semiconductor of the production methodological null monocrystal of the ZnSe based compound semiconductor monocrystal baseplate,

摘要

PROBLEM TO BE SOLVED: To provide a ZnSe compound semiconductor single crystal substrate with characteristics stabilized by suppressing the surface roughness of a ZnSe-based thin film; a compound semiconductor device; a light-emitting element; and a method of producing the compound semiconductor device.;SOLUTION: This single crystal substrate 1 comprises a single crystal ZnSe compound semiconductor and is characterized by that the face orientation is inclined toward a (111)A face direction at an angle of 1° or more but 20° or less with respect to a (100) face.;COPYRIGHT: (C)2004,JPO