Receives the carrying out methodological null plural exhaust processing being completed panels

摘要

PROBLEM TO BE SOLVED: To provide a method for carrying out an evacuated panel from an evacuation cart in which breakage of a chip pipe and leakage from the panel can be avoided when carrying out the panel from the evacuation cart by a robot.;SOLUTION: When carrying out the panel from the evacuation cart by using the robot, the position of a chip pipe clip 1 having a reference marker 3 is detected, the axes of a robot hand and the chip pipe clip 1 are agreed with each other to remove the chip pipe clip 1, and the position of a chip pipe 23 fitted to an evacuation head 24 is detected. Acceptance/rejection of the fitting a heater for sealing and cutting the chip pipe to the chip pipe 23 is determined based on the position information, and if the fitting is possible, the chip pipe 23 is sealed and cut after the fitting, a lower side of the panel P is supported by the robot hand to take out and transfer the panel P from the evacuation cart.;COPYRIGHT: (C)2003,JPO