Besides the fact that to be piled up with the cell which is adjacent with the cell which

摘要

PROBLEM TO BE SOLVED: To provide the manufacturing method of a reticle for manufacturing a semiconductor capable of shortening the time required for arranging a cell on a scribe line. SOLUTION: The cell data containing at least the data specifying a cell to be arranged, cell size and a cell arrangement rule and the scribe line net data showing the arrangement of the scribe line are inputted (S1, S2), a free area capable of arranging the cell to be arranged on the scribe line is retrieved based on these data, the cell is arranged in the retrieved free area (S4) and the cell arrangement data according to the arranged result are generated (S5).