And a shape measuring method of measuring the reflective surface of the stage 7XS 4 that moves along the reference plane, the shape of 7YS. While moving along the Y-axis direction stage 4, is measured at two positions spaced apart in the Z-axis direction, a one-dimensional shape of the reflecting surface 7XS the Y-axis direction, the difference of the one-dimensional shape data of the one and the other the the Y-axis direction while the position adjustment stage 4 measurement results based on measurement beam LWXP being irradiated simultaneously two positions to obtain the corresponding first data, spaced in the Z-axis direction of the reflecting surface 7XS is constant and moves, by measuring at a plurality of locations the displacement of the attitude control axis stage 4 during this movement, to obtain the second data corresponding to changes in the rotation amount around the the Y-axis about the Y-axis direction, the and correcting the 1-dimensional data based on the fourth data obtained by linear approximation corresponding to the third data on a difference between said second data with first data.
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