Image feature learning type defect detection method, defect detection apparatus and defect detection program

摘要

PPROBLEM TO BE SOLVED: To provide a defect detection method that automatically sets appropriate detection sensitivity for every pixel of an image according to both intra-image luminance variation and inter-image luminance variation with the use of a plurality of non-defective images imaging a plurality of non-defective units. PSOLUTION: The defect detection method automatically computes a non-defective average image as a reference image from at least one non-defective image, and a defect level fuzzy membership function as a filter for converting a luminance differential value between the reference image and an image to be inspected into a defect level about each image pixel position, and recognizes as a defect a local area in the image to be inspected where the sum of defect levels in a defect size to be detected is equal to or larger than a reference value. PCOPYRIGHT: (C)2004,JPO