APPARATUS INCLUDING A RADIATION SOURCE, A FILTER SYSTEM FOR FILTERING PARTICLES OUT OF RADIATION EMITTED BY THE SOURCE, AND A PROCESSING SYSTEM FOR PROCESSING THE RADIATION, A LITHOGRAPHIC APPARATUS INCLUDING SUCH AN APPARATUS, AND A METHOD OF FILTERING PARTICLES O

摘要

Particles emitted by a radiation source, and moving from the radiation source towards a processing system for processing the radiation from the radiation source, are filtered out of radiation propagating through a predetermined cross section of the radiation as emitted by the radiation source by a filter system. The filter system includes a plurality of foils and a transporter for transporting the foils along a trajectory which extends within the beam so that the foils intercept the particles within the beam. The transporter is arranged to transport the foils by a substantially translatory movement of the foils along at least a part of the trajectory.