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Method for protecting write head coil during write pole notching using ion mill resistant mask formed by reactive ion etching
Method for protecting write head coil during write pole notching using ion mill resistant mask formed by reactive ion etching
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机译:使用通过反应性离子蚀刻形成的耐离子磨的掩模在写极开槽期间保护写头线圈的方法
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摘要
A method for protecting a write head coil during write pole notching using ion mill resistant mask formed by reactive ion etching is disclosed. Ion mill shaping of the write pole is performed after depositing an ion mill-resistant material to protect the coil.
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