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Ultrasonic platform type microchip and method of driving array-shaped ultrasonic transducers
Ultrasonic platform type microchip and method of driving array-shaped ultrasonic transducers
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机译:超声平台型微芯片及驱动阵列形超声换能器的方法
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摘要
The present invention provides a micro chemical analysis system in which a flow type microchip configured to have a fine flow passage on a substrate is configured, the system comprising a common platform composed of a transducer layer and a signal control circuit layer, the transducer layer having array-shaped ultrasonic transducers. In addition, the flow type microchip is configured on the common platform.
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