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Process for obtaining a thin, insulating, soft magnetic film of high magnetization
Process for obtaining a thin, insulating, soft magnetic film of high magnetization
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机译:获得高磁化强度的绝缘薄软磁膜的方法
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摘要
A thin soft magnetic film combines a high magnetization with an insulating character. The film is formed by nitriding Fe-rich ferromagnetic nanograins immersed in an amorphous substrate. A selective oxidation of the amorphous substrate is then performed. The result is a thin, insulating, soft magnetic film of high magnetization. Many types of integrated circuits can be made which include a component using a membrane incorporating the above-mentioned thin film.
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