Ceramic setter plate and method for manufacturing multilayer ceramic substrate using the same

摘要

In a ceramic setter plate 10 of a plate-shaped sintered body 12 of a non-oxide ceramic material formed by firing ceramic particles 11 of at least one selected from the group consisting of SiC, Si₃N₄, BN, AlN, MoSi₂, TiN and ZrB₂, the sintered body 12 is composed of a porous body 12 having interconnected pores 15 and one or more cavities 13 inside thereof in substantially the center in the thickness direction of thereof, at least one of the cavities 13 has therein one or a plurality of branched parts 17, the cavities 13 have opening parts 14 at side parts of the sintered body 12. The ceramic setter plate has good gas permeability for firing a laminate of ceramic green sheets, for which the firing efficiency is good, and for which repeated use is possible.