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Method and apparatus for retrofitting existing real time control systems for monitoring, controlling, and distributing chemicals during electroplating
Method and apparatus for retrofitting existing real time control systems for monitoring, controlling, and distributing chemicals during electroplating
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机译:用于改进现有实时控制系统的方法和设备,以在电镀过程中监视,控制和分配化学品
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摘要
Chemical treatment process control, including a virtual sensor based upon artificial intelligence that automatically computes and predicts additive concentrations in chemical baths used in manufacturing to compensate for the lag time in obtaining data from real-time analyzers (RTA). Once actual measurement data is obtained, bath concentrations can be further adjusted if necessary. Also disclosed is the retrofitting of a RTA with a controller where the data signal from the RTA has a proprietary communication protocol that is converted by hardware and/or software into a signal having an open communication protocol for transmission to the controller for controlling electrochemical bath concentration. Further disclosed is a method of controlling chemical concentration of electrochemical baths by predicting the depletion of chemicals during manufacture and causing dosing and/or draining of a portion of the bath during the time delay between RTA analyses. An algorithm written into program language and compiled into an executable format can be used in the controllers.
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