Method of producing an electrode substrate, electrode substrate produced by the method, electrostatic actuator provided with the substrate, liquid droplet ejecting head provided with the actuator, and liquid droplet ejecting apparatus provided with the head

摘要

A method of producing an electrode substrate is provided that can form at least one recess of various configurations on an electrode substrate through a simplified process and with an increased degree of precision. Also provided are an electrode substrate produced by the method, an electrostatic actuator provided with the electrode substrate, a liquid droplet ejecting head provided with the actuator and a liquid droplet ejecting apparatus provided with the head. The method comprises a first step of forming at least one recess 41 on a glass substrate 4a through a press forming process in which a pressing mold is pressed against the glass substrate, and a second step of providing an electrode 42 on a bottom surface of each recess 41. The press forming process is preferably carried out under a condition that the substrate is heated up to a temperature of 350 to 800° C. It is desirable that the glass composing the glass substrate 4a has a coefficient of thermal expansion in the range of 20×10⁻⁷ to 90×10⁻⁷° C.⁻¹.