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Image sensor having a passivation layer exposing at least a main pixel array region and methods of fabricating the same

机译:具有至少暴露出主像素阵列区域的钝化层的图像传感器及其制造方法

摘要

A CMOS image sensor with improved sensitivity includes a main pixel array region of an active pixel array region formed on a semiconductor substrate. A passivation layer is formed over the sensor, and it is at least partially removed from the main pixel array region, such that incident light being detected by the main pixel array does not pass through the passivation layer. Optical absorption and refraction caused by the material of the passivation layer are eliminated, resulting in an image sensor with improved optical sensitivity.
机译:具有改进的灵敏度的CMOS图像传感器包括形成在半导体衬底上的有源像素阵列区域的主像素阵列区域。钝化层形成在传感器上方,并且钝化层至少部分地从主像素阵列区域中去除,使得由主像素阵列检测到的入射光不会穿过钝化层。消除了由钝化层的材料引起的光吸收和折射,从而导致图像传感器具有改善的光学灵敏度。

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