Micropump for delivering liquids at low delivery rates in a push/pull operating mode

摘要

The present invention generally discloses a micropump for delivering liquids at low delivery rates. The micropump has a reservoir chamber containing a liquid which is to be delivered. a suction space comprising a saturated pump solution. a condensation space comprising a saturated solution. A diaphragm separating the suction space and the condensation space. The diaphragm is permeable to water vapour and impermeable to liquid water. The water vaporizes out of the suction space into the condensation space, resulting in an increase in volume of the saturated solution in the condensation space, thereby exerting a pressure on an impermeable wall such that the liquid is driven out of the reservoir chamber.