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Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
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机译:固相外延沉积非晶材料并将其用作外延膜模板的方法
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摘要
Methods for forming epitaxial films involve forming a buffer layer on a single crystal substrate, depositing an amorphous layer on the buffer layer, then forming an epitaxial film from the amorphous layer by solid phase epitaxy.
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