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Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation

机译:具有空间相位调制的计量装置的偏振分束器和双检测器校准

摘要

An ellipsometer with a variable retarder, which introduces a spatial dependence in the beam, includes a polarizing beam splitter to produce two beams with orthogonal polarization states. The beam splitter may be, e.g., a polarizing displacer or polarizing beam splitter. The intensities of the two beams are measured, e.g., using separate detectors or separate detector elements in an array. The intensity from the two beams may be summed and used as a reference to normalize intensity of the produced beam.
机译:具有可变延迟器的椭圆仪,其在光束中引入了空间依赖性,其包括偏振分束器以产生具有正交偏振态的两个光束。分束器可以是例如偏振移位器或偏振分束器。例如使用阵列中的单独的检测器或单独的检测器元件来测量两个光束的强度。来自两个光束的强度可以求和,并用作归一化所产生光束的强度的参考。

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