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Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation
Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation
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机译:具有空间相位调制的计量装置的偏振分束器和双检测器校准
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摘要
An ellipsometer with a variable retarder, which introduces a spatial dependence in the beam, includes a polarizing beam splitter to produce two beams with orthogonal polarization states. The beam splitter may be, e.g., a polarizing displacer or polarizing beam splitter. The intensities of the two beams are measured, e.g., using separate detectors or separate detector elements in an array. The intensity from the two beams may be summed and used as a reference to normalize intensity of the produced beam.
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