首页> 外国专利> Semiconductor laser device capable of preventing a threshold current and an operating current from increasing and manufacturing method therefor

Semiconductor laser device capable of preventing a threshold current and an operating current from increasing and manufacturing method therefor

机译:能够防止阈值电流和工作电流增加的半导体激光装置及其制造方法

摘要

A ridge section constructed of a p-type second AlGaInP clad layer 8, a p-type GaInP interlayer 9 and a p-type GaAs cap layer 10 is formed on an etching stop layer 7. A step of not smaller than 0.13 μm is formed between the p-type interlayer 9 and the p-type second clad layer 8 by making the p-type interlayer 9 protrude in both widthwise directions beyond the p-type second clad layer 8. With this step, AlInP layers can be formed separately from each other on both sides of the ridge section and on the ridge section. Therefore, when the AlInP layer on the ridge section is removed by etching, an AlInP current constriction layer 13 located on both sides of the ridge section is reliably protected by a resist film and not over-etched. The AlInP current constriction layer 13 effectively puts a current constriction function into effect, so that a semiconductor laser device of low-threshold current and low-power consumption is obtained.
机译:由p型第二AlGaInP覆盖层 8 ,p型GaInP中间层 9 和p型GaAs覆盖层 10 构成的脊部。在蚀刻停止层 7 上形成B>。通过使p型中间层形成在p型中间层 9 和p型第二包覆层 8 之间,台阶不小于0.13μm。 9 在两个宽度方向上都突出超过p型第二包层 8 。通过该步骤,可以在脊部的两侧和脊部上彼此分开地形成AlInP层。因此,当通过蚀刻去除脊部上的AlInP层时,位于脊部两侧的AlInP电流限制层 13 被抗蚀剂膜可靠地保护并且不会被过度蚀刻。 AlInP电流限制层 13 有效地实现了电流限制功能,从而获得了低阈值电流和低功耗的半导体激光器。

著录项

  • 公开/公告号US6999488B2

    专利类型

  • 公开/公告日2006-02-14

    原文格式PDF

  • 申请/专利权人 ATSUO TSUNODA;

    申请/专利号US20030602827

  • 发明设计人 ATSUO TSUNODA;

    申请日2003-06-25

  • 分类号H01S5/00;

  • 国家 US

  • 入库时间 2022-08-21 21:43:16

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