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Benzocyclobutene polymer (BCB) as a passivation layer for optical passive elements
Benzocyclobutene polymer (BCB) as a passivation layer for optical passive elements
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机译:苯并环丁烯聚合物(BCB)作为光学无源元件的钝化层
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摘要
An InP-based photonic integrated circuit (PIC) includes an optical passive element in the circuit with no bias current applied to such an element. A passivation cladding layer overlies a surface of the optical passive element where the passivation layer comprises benzocyclobutene polymer or BCB.
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