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Micromirrors and hinge structures for micromirror arrays in projection displays
Micromirrors and hinge structures for micromirror arrays in projection displays
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机译:投影显示器中用于微镜阵列的微镜和铰链结构
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摘要
The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.
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